Agilent Vacuum Technologies VHS-10 VERSION FOR VG SEMICON LTD.
The Agilent VHS-10 is a high-capacity diffusion pump designed for demanding industrial and research vacuum applications. This specific version, designated for VG Semicon Ltd., is based on the standard VHS-10 platform, which offers a pumping speed of up to 10,000 liters per second for air. The pump features robust stainless steel construction, water-cooled baffles, and compatibility with a wide range of vacuum system configurations. It is engineered for reliable, long-term operation in semiconductor manufacturing and other high-vacuum environments, providing efficient evacuation and low ultimate pressures. The VHS-10 is known for its ease of maintenance, high throughput, and adaptability to various process requirements.