Keithley Instruments Inc. HIGH POWER SOURCE-MEASURE UNIT WITH PREAMPLIFIER MODULE 6
The Keithley 4200A-4210-SMU-PA6 is a high power source measure unit (SMU) module designed for use with the 4200A-SCS Parameter Analyzer system. This module integrates a high power SMU with a preamplifier, enabling precise sourcing and measurement of voltage and current for advanced semiconductor device characterization. The 4210-SMU provides up to ±210 V and ±1 A output, with measurement resolution down to 100 fA when used with the preamplifier. The PA6 preamplifier extends the low current measurement capability, making the module suitable for applications such as subthreshold and gate leakage measurements in semiconductor devices. The module is designed for seamless integration and automated testing within the 4200A-SCS platform, supporting a wide range of device test requirements.